Particle-beam spectroscopy is a class of analytical methods in which a focused beam of charged or neutral particles (e.g., electrons, ions, neutrons) is directed at a target to probe its electronic, structural, or compositional properties via energy- and angle-resolved detection of scattered or emitted particles or photons. Techniques such as electron energy-loss spectroscopy (EELS), ion-beam analysis (IBA), Rutherford backscattering spectrometry (RBS), and neutron spectroscopy fall under this umbrella. These methods exploit particle–matter interaction cross-sections, energy transfer, and momentum exchange to yield quantitative information on elemental composition, depth profiles, bonding environments, excitations, and lattice dynamics at micro- to nanoscale spatial resolution.
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