Ultra-thin solar blind EUV imager reported by Imec

Dec 08, 2010

Yesterday at the International Electron Devices Meeting in San Francisco imec presents an ultra-thin hybrid AlGaN-on-Si-based extreme ultraviolet (EUV) imager with only 10µm pixel-to-pixel pitch. The wide-bandgap material (AlGaN) provides insensitivity to visible wavelengths and enhanced UV radiation hardness compared to silicon. Backside illumination in a hybrid design was used to achieve a very small pitch-to-pitch (10µm only). The novel imager shows an excellent detection down to a wavelength of 1nm.

Ultraviolet detection is of particular interest for solar science, EUV microscopy and advanced EUV lithography tools. Sensors using wide-bandgap materials overcome the drawbacks of Si-based sensors such as their sensitivity to UV radiation damage and the need for filters to block the unnecessary visible and infrared radiation.

’s backside illuminated EUV imager is based on a state-of-the-art hybrid design integrating an AlGaN sensor on a silicon readout chip. A submicron thick AlGaN layer was grown on a Si(111) wafer using molecular beam epitaxy and a focal plane array of 256x256 pixels with a pixel-to-pixel pitch of 10 micron was processed. Each pixel contains a Schottky diode optimized for backside illumination.

A custom read-out chip, based on capacitance transimpedance amplifiers, was fabricated in 0.35µm CMOS technology. The AlGaN wafer and read-out chip were post-processed with indium solder bumps with 10µm pixel-to-pixel pitch achieving excellent uniformity. The focal plane array and read-out chip were assembled using flip-chip bonding and subsequently the silicon substrate was locally removed to enable backside illumination of the active AlGaN layer. Finally, the imager was packaged and wire-bonded. Measurements demonstrated an excellent response down to a wavelength of 1nm.

These results were obtained in collaboration with CRHEA/CNRS (France) and the Royal Observatory of Belgium in the framework of the BOLD project of the European Space Agency (ESA).

Explore further: Misinformation diffusing online

add to favorites email to friend print save as pdf

Related Stories

World's Smallest 2.0µm-Pixel MOS Image Sensor

Feb 09, 2005

Panasonic, the leading brand by which Matsushita Electric Industrial Co., Ltd. is known, today announced the development of the world's smallest image sensor. The revolutionary MOS image sensor has only 2.0 × 2.0 μm ...

Sony develops new back-illuminated CMOS image sensor

Jun 11, 2008

Sony Corporation today announced the development of a back-illuminated CMOS image sensor (pixel size: 1.75µm square pixels, five effective mega pixels, 60 frames/s) with significantly enhanced imaging characteristics, ...

IMEC reports major progress in EUV

Jul 14, 2008

IMEC reports functional 0.186µm2 32nm SRAM cells made with FinFETs from which the contact layer was successfully printed using ASML’s full field extreme ultraviolet (EUV) Alpha Demo Tool (ADT). Applied ...

Recommended for you

Misinformation diffusing online

1 hour ago

The spread of misinformation through online social networks is becoming an increasingly worrying problem. Researchers in India have now modeled how such fictions and diffuse through those networks. They described details ...

Many tongues, one voice, one common ambition

2 hours ago

There is much need to develop energy efficient solutions for residential buildings in Europe. The EU-funded project, MeeFS, due to be completed by the end of 2015, is developing an innovative multifunctional and energy efficient ...

Chinese man brings gay conversion therapy lawsuit

3 hours ago

(AP)—A gay Chinese man said Thursday he was suing a psychological clinic for carrying out electric shocks intended to turn him straight, as well as the search engine giant Baidu for advertising the center.

Panasonic, Tesla to build big US battery plant

3 hours ago

(AP)—American electric car maker Tesla Motors Inc. is teaming up with Japanese electronics company Panasonic Corp. to build a battery manufacturing plant in the U.S. expected to create 6,500 jobs.

User comments : 0