New photoresist technology for organic semiconductors enabling submicron patterns

September 26, 2013, IMEC
15μm diameter OLED dots were arrayed with 20μm pitch by patterning deposited small molecule organic semiconductor materials with the new photoresist technology. It was confirmed that each dot emitted uniform light.

FUJIFILM Corporation and imec have developed a new photoresist technology for organic semiconductors that enables the realization of submicron patterns.

Due to their lightness, flexibility, and the possibility to manufacture them in large area, research and development on organic semiconductors has intensified in recent years. Organic semiconductors can be used in various applications such as , , organic photodetectors and various other types of sensors. Current methods for patterning organic semiconductors include shadow masking and inkjet printing. However, these patterning methods are not suitable for high-resolution patterning on large-size substrates. Patterning based on photolithography6 would solve this issue. But photolithography is currently mainly adopted for patterning of silicon semiconductors. When applying it to organic semiconductors using standard photoresists, the photoresist dissolves the organic semiconductor material during processing.

Fujifilm and imec have developed a new photoresist technology that enables submicron patterning on large-size substrates without damaging the organic semiconductor materials. The new photoresist technology was developed by fusing the semiconductor processing technology of Fujifilm and imec, with Fujifilm's synthetic-organic chemistry material design technology. Since existing i-line photolithography equipment can be used, and investment for new equipment is unnecessary, the new technology contributes to a cost-effective production of high-resolution organic .

Organic semiconductor materials were patterned to form OPD of 300×300μm size, and photoelectric conversion property with irradiation of artificial sunlight (AM1.5G) (red dotted line) was examined. When compared with photoelectric conversion property without patterning organic semiconductor materials (red solid line), it did not show degradation due to patterning. Similarly, there was no difference between with patterning (black dotted line) and without patterning (black solid line) for unirradiated dark current.

For technical verification, Fujifilm and imec developed organic (OPD) and organic light-emitting diodes (OLED) using the new photolithography technology, and tested their performance. Organic semiconductor materials were patterned to produce OPD composed of fine light receiving elements down to 200?m×200?m size. Generally, patterning of organic semiconductor materials degrades the property of converting light into electricity (photoelectric conversion property), but the OPD developed in this case were patterned without degradation. With respect to the OLED arrays that were produced using the newly developed photolithography pattering method: 20?m pitch OLEDs emitting uniform light, were realized.

Fujifilm and will continue to contribute to industrialization of organic electronics by advancing research and development of , processing technology and system integration.

Explore further: Organic CMOS image sensor technology using organic photoelectric conversion layer

Related Stories

Imec unveils fully organic imager for X-ray applications

June 13, 2013

At this week's International Image Sensor Workshop (IISW 2013, Snowbird, Utah, June 12-16 2013), imec and Holst Centre presented a large-area fully-organic photodetector array fabricated on a flexible substrate. The imager ...

Lighting the way to the future

September 3, 2013

The highly inefficient incandescent light bulb is now a thing of the past, banned from European supermarket shelves in favour of more efficient lighting. The ban is part of the EU's strategy to reduce overall energy consumption ...

Recommended for you

In colliding galaxies, a pipsqueak shines bright

February 20, 2019

In the nearby Whirlpool galaxy and its companion galaxy, M51b, two supermassive black holes heat up and devour surrounding material. These two monsters should be the most luminous X-ray sources in sight, but a new study using ...

When does one of the central ideas in economics work?

February 20, 2019

The concept of equilibrium is one of the most central ideas in economics. It is one of the core assumptions in the vast majority of economic models, including models used by policymakers on issues ranging from monetary policy ...

Research reveals why the zebra got its stripes

February 20, 2019

Why do zebras have stripes? A study published in PLOS ONE today takes us another step closer to answering this puzzling question and to understanding how stripes actually work.

Correlated nucleons may solve 35-year-old mystery

February 20, 2019

A careful re-analysis of data taken at the Department of Energy's Thomas Jefferson National Accelerator Facility has revealed a possible link between correlated protons and neutrons in the nucleus and a 35-year-old mystery. ...

0 comments

Please sign in to add a comment. Registration is free, and takes less than a minute. Read more

Click here to reset your password.
Sign in to get notified via email when new comments are made.