Video: Nanoengineered electron guns

In this video we see an electron gun made of many thousands of vertically aligned carbon nanotubes, each more than 1,000 times smaller than the width of a human hair. Dr Matt Cole, from the University of Cambridge, explains ...

Higher dose sensitivity progress in novel photoresist platforms

SEMATECH announced today that researchers have reported progress which could significantly improve resist sensitivity by incorporating metal oxide nanoparticles for extreme ultraviolet (EUV) lithography, bringing the technology ...

New biomimetic material to develop nanosensors

The new features of this biomimetic material will allow us to develop multiple nanometer-sized chemical sensors over the same substrate by electron beam lithography, as a result, multifunctional biochips of major versatility ...

SEMATECH achieves world-class defect reductions in EUV

SEMATECH announced today that researchers have reached a significant milestone in reducing tool-generated defects from multi-layer deposition of mask blanks used for extreme ultraviolet lithography (EUVL), bringing that technology ...

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