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Nanophysics Jul 20, 2006

Nanoparticles self-assemble through chemical lithography

Nanoparticles – while possessing some amazing properties of strength and power – are also delicate little things, when it comes to manipulating them for use in nanodevices. Many scientists consider that the most promising ...

Apr 24, 2006

Researchers develop detailed design rules for nanoimprint lithography processing

Using a combination of experimental data and simulations, researchers have identified key parameters that predict the outcome of nanoimprint lithography, a fabrication technique that offers an alternative to traditional lithography ...

Apr 21, 2006

Rigiflex lithography improves organic LEDs

In the race to create the roll-up TV (and a host of other devices), scientists are continually manipulating organic light-emitting diode (OLED) technology. Recently, researchers from Korea have designed a technique that is ...

Mar 17, 2006

New 'Liquid Lens' Data for Immersion Lithography

New data on the properties of potential "liquid lenses" compiled by the National Institute of Standards and Technology (NIST) could help the semiconductor industry continue to shrink feature sizes on computer chips.

Feb 10, 2006

Breakthrough Computer Chip Lithography Method Developed at RIT

A new computer chip lithography method under development at Rochester Institute of Technology has led to imaging capabilities beyond that previously thought possible.

Oct 4, 2005

SEMATECH and Synopsys to Develop Advanced OPC Models For 45 nm and Below Immersion Lithography

Synopsys, Inc. and SEMATECH today announced a joint program to develop advanced optical proximity correction (OPC) models that will enable the extension of optical lithography.

Jul 5, 2005

Albany NanoTech Enhances State-of-the Art Lithography Research with New EUV Source from Energetiq

Albany NanoTech, a leading global center for nanotechnology research, development and deployment, today announced the delivery of a new state of the art tool for extreme ultraviolet (EUV) lithography research, built by Energetiq ...

Jan 25, 2005

Cymer partners with IMEC on immersion lithography

Cymer, Inc., the world's leading supplier of deep ultraviolet (DUV) light sources used in semiconductor manufacturing, today announced the integration of a Cymer XLA 105 argon fluoride (ArF) light source on a 0.85 numerical ...

Jan 21, 2005

SEMATECH Meeting Identifies Challenges to Maturing Maskless Lithography

Guided by input from more than 100 industry professionals, a SEMATECH-led steering committee has ranked the critical issues for bringing maskless lithography (ML2) from R&D concepts to limited commercial production, possibly ...

Dec 22, 2004

TSMC Verifies Fully Functional 90 Nanometer Chips Using Immersion Lithography Tools

Findings Suggests Immersion is Nearly Ready For Production Taiwan Semiconductor Manufacturing Company, said that it used immersion lithography tools to produce fully functional 90nm devices. The finding was presented in ...

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