Applied Materials Announces Breakthrough in Interface Engineering Technology for 65-45nm Transistors

Sep 20, 2005

Applied Materials, Inc. today announced a key advancement in nano-scale interface engineering with its new Applied Siconi Preclean process for fabricating leading-edge transistor contacts.

The Siconi Preclean replaces conventional plasma-based sputter etch technology with a dry, chemical process that gently but effectively removes oxidized silicon under high vacuum. This one-step process prepares the wafer's surface prior to the formation of the critical nickel (Ni) silicide layer to create an interface with minimal damage. The Siconi Preclean also dramatically reduces interface defects while eliminating wet clean queue time restrictions.

"The smallest transistor structures are now only a few atoms or molecules in size, making atomic-level thin film interface engineering extremely critical to the chip's function," said Dr. Farhad Moghadam, senior vice president and general manager of Applied Materials' Thin Films Group. "Combined with our Applied Endura ALPS Ni PVD system, this new Siconi Preclean process enables advanced logic customers to more easily transition to nickel silicide technology to achieve higher switching speeds with lower current leakage -- thus helping to reduce power usage in their advanced chip designs. We are working to extend the breakthrough advantages of our Siconi Preclean technology to other process applications."

The Applied Siconi Preclean process, which is completed in a single chamber for optimal throughput and system utilization, is highly selective to oxide, enabling oxide removal with minimal impact to other materials or small features on the device. The Siconi Preclean technology can also be used after silicidation to remove the oxidized silicide, forming a low resistance interface with the contact structure.

Explore further: Twitter admits to diversity problem in workforce

add to favorites email to friend print save as pdf

Related Stories

Putin signs law seen as crimping social media

20 minutes ago

President Vladimir Putin on Tuesday signed a law requiring Internet companies to store all personal data of Russian users at data centres in Russia, a move which could chill criticism on foreign social networking ...

New launch date set for ISS delivery vessel

29 minutes ago

A robot ship will be launched from Kourou, French Guiana, after a five-day delay on July 29 to deliver provisions to the International Space Station, space transport firm Arianespace said Tuesday.

P90X? Why consumers choose high-effort products

45 minutes ago

Stuck in traffic? On hold for what seems like an eternity? Consumers often face situations that undermine their feelings of control. According to a new study in the Journal of Consumer Research, when a person's sense of con ...

Recommended for you

Nokia profits rise after sale of handset division

7 minutes ago

(AP)—Telecommunications and wireless equipment maker Nokia Corp. saw its shares surge on Thursday after it reported higher profits and an improved earnings outlook in the wake of its sale to Microsoft of its troubled handset ...

Twitter admits to diversity problem in workforce

2 hours ago

(AP)—Twitter acknowledged Wednesday that it has been hiring too many white and Asian men to fill high-paying technology jobs, just like several other major companies in Silicon Valley.

Swiss drug maker Roche posts 7 percent profit drop

3 hours ago

(AP)—Swiss drugmaker Roche Holding AG on Thursday posted a net profit drop of 7 percent compared with a year ago, weighed down by a strong Swiss franc and charges from one of its diagnostic units.

User comments : 0