Reference Materials Planned for Semiconductor Industry

Jul 01, 2005

Companies and research organizations are invited to collaborate with the National Institute of Standards and Technology (NIST) and SEMATECH in the development and evaluation of a new generation of reference materials for the semiconductor and tool manufacturing industries. The work is a continuation of NIST's efforts to provide standard "rulers" for measuring chip features. The new reference materials will differ from the previous generation in several ways. Current plans call for each reference material to be configured as a 200-millimeter wafer with a selection of die sites, each with multiple test structures with certified critical dimensions between 40 and 500 nanometers.

The reference-material design, fabrication and calibration will be led by the NIST-SEMATECH team. The principal role of participating companies and other organizations will be evaluation of the reference materials, but they also may contribute expertise, equipment time, or other resources. Participants will receive one or more wafers, and all associated measurement documentation, on completion of the work.

Those interested in participating are invited to a public event scheduled for July 13, 2005, at the San Francisco Marriott. More information and registration forms are available online at www.sematech.org/membersite/MServlet?mtgId=7682. For further information contact, Michael Cresswell, michael.cresswell@nist.gov, (301) 975-2072.

Information about the previous set of reference materials, delivered to SEMATECH member companies earlier this year, is available at phys.org/news3177.html

Source: NIST

Explore further: NBCUniversal settles with unpaid interns for $6.4M

add to favorites email to friend print save as pdf

Related Stories

Cosmic rays threaten future deep-space astronaut missions

19 hours ago

Crewed missions to Mars remain an essential goal for NASA, but scientists are only now beginning to understand and characterize the radiation hazards that could make such ventures risky, concludes a new paper ...

A novel platform for future spintronic technologies

Oct 12, 2014

Spintronics is an emerging field of technology where devices work by manipulating the spin of electrons rather than their charge. The field can bring significant advantages to computer technology, combining higher speeds ...

Recommended for you

NBCUniversal settles with unpaid interns for $6.4M

9 minutes ago

NBCUniversal will pay $6.4 million to settle a class action lawsuit brought by unpaid interns who worked on "Saturday Night Live" and other shows who claim they are owed wages, according to court documents.

Team infuses science into 'Minecraft' modification

21 minutes ago

The 3-D world of the popular "Minecraft" video game just became more entertaining, perilous and educational, thanks to a comprehensive code modification kit, "Polycraft World," created by University of Texas at Dallas professors, ...

States ascend into the cloud

48 minutes ago

Seven years ago, the state of Delaware started moving computer servers out of closets and from under workers' desks to create a consolidated data center and a virtual computing climate.

User comments : 0