Reference Materials Planned for Semiconductor Industry

Jul 01, 2005

Companies and research organizations are invited to collaborate with the National Institute of Standards and Technology (NIST) and SEMATECH in the development and evaluation of a new generation of reference materials for the semiconductor and tool manufacturing industries. The work is a continuation of NIST's efforts to provide standard "rulers" for measuring chip features. The new reference materials will differ from the previous generation in several ways. Current plans call for each reference material to be configured as a 200-millimeter wafer with a selection of die sites, each with multiple test structures with certified critical dimensions between 40 and 500 nanometers.

The reference-material design, fabrication and calibration will be led by the NIST-SEMATECH team. The principal role of participating companies and other organizations will be evaluation of the reference materials, but they also may contribute expertise, equipment time, or other resources. Participants will receive one or more wafers, and all associated measurement documentation, on completion of the work.

Those interested in participating are invited to a public event scheduled for July 13, 2005, at the San Francisco Marriott. More information and registration forms are available online at www.sematech.org/membersite/MServlet?mtgId=7682. For further information contact, Michael Cresswell, michael.cresswell@nist.gov, (301) 975-2072.

Information about the previous set of reference materials, delivered to SEMATECH member companies earlier this year, is available at phys.org/news3177.html

Source: NIST

Explore further: Download woes and HealthKit flaw bite iPhone software

add to favorites email to friend print save as pdf

Related Stories

Carbon injection initiative supported by new research

Sep 16, 2014

Worldwide attempts to tackle global warming by injecting carbon dioxide into underground volcanic rock have been informed by new research that shows the process happens naturally on a massive scale over millions ...

Seeking proof for the no-hair theorem

Sep 09, 2014

According to general relativity, a black hole has three measurable properties: mass, rotation (angular momentum), and charge. That's it. If you know those three things, you know all there is to know about ...

Chameleon: Cloud computing for computer science

Aug 26, 2014

Cloud computing has changed the way we work, the way we communicate online, even the way we relax at night with a movie. But even as "the cloud" starts to cross over into popular parlance, the full potential ...

Recommended for you

Peugeot hybrid compressed-air car set for Paris Motor Show

3 hours ago

An 860-kilogram concept city car from Peugeot indicates impressive fuel economy. This latest concept "has its sights set on meeting the French government's goal of putting an affordable 2.0l/100km (141mpg) car into production by 2020," said Jordan Bis ...

Hit 'Just Dance' game goes mobile Sept. 25

4 hours ago

Smartphone lovers will get to show off moves almost anywhere with the Sept. 25 release of a free "Just Dance Now" game tuned for mobile Internet lifestyles.

Alibaba's plan: Today, China. Tomorrow, the world.

4 hours ago

Amazon and eBay should watch their backs. As Chinese e-commerce powerhouse Alibaba readies what could be the biggest initial public offering ever on the New York Stock Exchange, it is quietly hinting at plans ...

User comments : 0