Reference Materials Planned for Semiconductor Industry

Jul 01, 2005

Companies and research organizations are invited to collaborate with the National Institute of Standards and Technology (NIST) and SEMATECH in the development and evaluation of a new generation of reference materials for the semiconductor and tool manufacturing industries. The work is a continuation of NIST's efforts to provide standard "rulers" for measuring chip features. The new reference materials will differ from the previous generation in several ways. Current plans call for each reference material to be configured as a 200-millimeter wafer with a selection of die sites, each with multiple test structures with certified critical dimensions between 40 and 500 nanometers.

The reference-material design, fabrication and calibration will be led by the NIST-SEMATECH team. The principal role of participating companies and other organizations will be evaluation of the reference materials, but they also may contribute expertise, equipment time, or other resources. Participants will receive one or more wafers, and all associated measurement documentation, on completion of the work.

Those interested in participating are invited to a public event scheduled for July 13, 2005, at the San Francisco Marriott. More information and registration forms are available online at www.sematech.org/membersite/MServlet?mtgId=7682. For further information contact, Michael Cresswell, michael.cresswell@nist.gov, (301) 975-2072.

Information about the previous set of reference materials, delivered to SEMATECH member companies earlier this year, is available at phys.org/news3177.html

Source: NIST

Explore further: Key facts on US 'open Internet' regulation

add to favorites email to friend print save as pdf

Related Stories

Satire has a history of informing during times of crisis

Jan 29, 2015

Just as only the jester can tell the King the truth, satire performs a vital function in democratic society by using humor to broach taboo subjects, especially in times of crisis, according to a book by Penn State researchers.

New pathway to valleytronics

Jan 27, 2015

A potential avenue to quantum computing currently generating quite the buzz in the high-tech industry is "valleytronics," in which information is coded based on the wavelike motion of electrons moving through ...

Recommended for you

Key facts on US 'open Internet' regulation

6 hours ago

A landmark ruling by the US Federal Communications Commission seeks to enshrine the notion of an "open Internet," or "net neutrality." Here are key points:

Spotify deals with random shuffle and we mortals

6 hours ago

How do we mortals perceive random sequences? An entry in the question-and-answer site Quora focused on a question involving a music-streaming service Spotify. That question signifies how we perceive what ...

User comments : 0

Please sign in to add a comment. Registration is free, and takes less than a minute. Read more

Click here to reset your password.
Sign in to get notified via email when new comments are made.