Reference Materials Planned for Semiconductor Industry

Jul 01, 2005

Companies and research organizations are invited to collaborate with the National Institute of Standards and Technology (NIST) and SEMATECH in the development and evaluation of a new generation of reference materials for the semiconductor and tool manufacturing industries. The work is a continuation of NIST's efforts to provide standard "rulers" for measuring chip features. The new reference materials will differ from the previous generation in several ways. Current plans call for each reference material to be configured as a 200-millimeter wafer with a selection of die sites, each with multiple test structures with certified critical dimensions between 40 and 500 nanometers.

The reference-material design, fabrication and calibration will be led by the NIST-SEMATECH team. The principal role of participating companies and other organizations will be evaluation of the reference materials, but they also may contribute expertise, equipment time, or other resources. Participants will receive one or more wafers, and all associated measurement documentation, on completion of the work.

Those interested in participating are invited to a public event scheduled for July 13, 2005, at the San Francisco Marriott. More information and registration forms are available online at www.sematech.org/membersite/MServlet?mtgId=7682. For further information contact, Michael Cresswell, michael.cresswell@nist.gov, (301) 975-2072.

Information about the previous set of reference materials, delivered to SEMATECH member companies earlier this year, is available at phys.org/news3177.html

Source: NIST

Explore further: EU urged to convert TV frequencies to mobile broadband

add to favorites email to friend print save as pdf

Related Stories

Chameleon: Cloud computing for computer science

Aug 26, 2014

Cloud computing has changed the way we work, the way we communicate online, even the way we relax at night with a movie. But even as "the cloud" starts to cross over into popular parlance, the full potential ...

How Titan's haze help us understand life's origins

Aug 25, 2014

Where did life on Earth come from? There are several theories as to what might have happened. Maybe comets came bearing organic material, or life was transported from another planet such as Mars, or something ...

Unlocking the potential of simulation software

Aug 21, 2014

With a method known as finite element analysis (FEA), engineers can generate 3-D digital models of large structures to simulate how they'll fare under stress, vibrations, heat, and other real-world conditions.

Demystifying the dis-domestication of consumer products

Aug 18, 2014

Prolonging the lifespan of products is vital in order to decouple economic success from environmental impact, according to Marie Hebrok of the National Institute for Consumer Research (SIFO) in Oslo, Norway. Writing in the ...

Hoopoes' eggs show their true colors

Aug 14, 2014

Hoopoe females use cosmetics on their eggs - and the eggs gradually change color when they are incubated, from bluish-grey to a more saturated greenish-brown. This happens because secretion from the uropygial or preen gland ...

Recommended for you

Top South America hackers rattle Peru's Cabinet

3 hours ago

The Peruvian hackers have broken into military, police, and other sensitive government networks in Argentina, Colombia, Chile, Venezuela and Peru, defacing websites and extracting sensitive data to strut ...

User comments : 0