Elpida Memory Develops 90 nm Silicon Wafer Process for High-Performance DDR2 SDRAM

Dec 04, 2004

Advanced Process Technology Boosts Production Efficiency for Superior DDR2 Products

Elpida Memory, Inc., Japan's leading global supplier of Dynamic Random Access Memory (DRAM), today announced that is has developed its new 90 nm production process for high-performance DRAM products. 90 nm (or 0.09 micron) is the next-generation measurement for silicon wafer manufacturing, following 100 nm (or 0.10 micron). It will allow more silicon chips to be produced on a single wafer because the size of each chip is smaller, and it improves overall production efficiency. Elpida's 90 nm process technology will first be applied to the production of high-performance 512 Megabit and 1 Gigabit DDR2 SDRAM products starting next year.

"Each transition to a smaller process geometry is no easy task and involves development of the process, followed by development of a new device design, and finally production using the new process and design together," said Yukio Sakamoto, president of Elpida Memory, Inc. "Elpida has verified this new 90 nm process technology and demonstrated high production yields equivalent to that of our currently mass produced 100 nm-based devices. During mass production, we anticipate an increase in productivity by 20% or more from our new 90 nm production process."

Elpida's 90 nm Process Technology

Elpida is using the same KrF optical lithography - with a wavelength of 248 nm - that is used for current mass production of 100 nm devices in its new 90 nm lines. Combined with the use of Optical Proximity Correction (OPC) the new process refines and reduces the geometric size of the memory cell and its peripherals by 90% while maintaining high production yields. The defect level defining the yield in production of the new 90 nm process has been confirmed to be as low as that of Elpida's mass-produced 100 nm process.

Elpida also implements an original silicide contact technology. With the 90 nm process, the geometry of the contact hole for the connecting nodes in the circuitry also becomes smaller. Consequently, this introduces additional resistance around the circuitry and impacts the speed performance. By introducing this silicidation technology, this problem has been greatly reduced, enabling DDR2 SDRAM to achieve speed performances on the order of 667 Mbps, 800 Mbps and beyond.

Explore further: Microsoft beefs up security protection in Windows 10

add to favorites email to friend print save as pdf

Related Stories

Japan's once-mighty tech industry has flagged

Oct 19, 2012

In the 1980s, Sony co-founder Akio Morita fired a verbal missile across the Pacific at Silicon Valley: Japan's supremacy in business and technology would overwhelm U.S. competitors and lead to America's decline.

Elpida Memory develops resistance RAM prototype

Jan 24, 2012

Elpida Memory, the world's third largest Dynamic Random Access Memory ("DRAM") manufacturer, today announced the development of its first-ever high-speed non-volatile resistance memory (ReRAM) prototype. As the ReRAM prototype ...

Elpida develops 1600 Mbps 4-gigabit DDR3 mobile RAM (LPDDR3)

Nov 24, 2011

Elpida Memory, Dynamic Random Access Memory ("DRAM") manufacturer, today announced that it has developed an advanced 30nm process 4-gigabit DDR3 Mobile RAMTM (LPDDR3). The new chip can achieve a high-speed data transfer rate ...

Recommended for you

Microsoft beefs up security protection in Windows 10

16 hours ago

What Microsoft users in business care deeply about—-a system architecture that supports efforts to get their work done efficiently; a work-centric menu to quickly access projects rather than weather readings ...

US official: Auto safety agency under review

Oct 24, 2014

Transportation officials are reviewing the "safety culture" of the U.S. agency that oversees auto recalls, a senior Obama administration official said Friday. The National Highway Traffic Safety Administration has been criticized ...

Out-of-patience investors sell off Amazon

Oct 24, 2014

Amazon has long acted like an ideal customer on its own website: a freewheeling big spender with no worries about balancing a checkbook. Investors confident in founder and CEO Jeff Bezos' invest-and-expand ...

Ebola.com domain sold for big payout

Oct 24, 2014

The owners of the website Ebola.com have scored a big payday with the outbreak of the epidemic, selling the domain for more than $200,000 in cash and stock.

Hacker gets prison for cyberattack stealing $9.4M

Oct 24, 2014

An Estonian man who pleaded guilty to orchestrating a 2008 cyberattack on a credit card processing company that enabled hackers to steal $9.4 million has been sentenced to 11 years in prison by a federal judge in Atlanta.

Magic Leap moves beyond older lines of VR

Oct 24, 2014

Two messages from Magic Leap: Most of us know that a world with dragons and unicorns, elves and fairies is just a better world. The other message: Technology can be mindboggingly awesome. When the two ...

User comments : 0