UV Nanoimprint

Dec 06, 2004
UV Nanoimprint

The german WDR (Westdeutscher Rundfunk) has reported in its science magazin Q21 about the fabrication of nano sized structures by UV Nanoimprint. The technology is decriped on the example of a miniaturized page of Gutenbergs Bibel which has been fabrictated in AMO (AMICA).

The story in german can be found on the webpage of Q21.

UV Nanoimprint is a low cost fabrication technology for nanoelectronic and photonic devices with dimensions far below 100 nm. AMO develops process technology and optimizes the tool platform since several year aiming for the comercialisation of this next generation lithography technology.

About UV Nanoimprint:

Nanoimprint lithography (NIL) has received considerable interests in the last few years for fulfilling the demands of low cost and high resolution nano lithographic technique. Conventional NIL processes, however, coined as stamp and step processes require thermal cycles between 140°C and 180°C and high pressures during the hot embossing procedure. Thermal and mechanical loads involved in these processes represent a nearly prohibitive burden for fast and high precision alignment. The mechanical masses to be moved in high throughput equipment require a large degree of complex mechanical handling.

A new UV based nanoimprint lithography (UV-NIL) has been developed and demonstrated at AMO as attractive alternative to the hot embossing technique. The low pressure (<1bar) as well as the absence of any thermal cycles appears very attractive for high precision printing down to 10 nm and relaxes the technical requirements for placement accuracy and pattern fidelity to a large extent. In addition the UV based curing opens the way to “step&repeat” modes in this lithographic process, which are necessary for processing on the wafer scale.

Just recently Nanoimprint has been included in the International Technology Roadmap for Semiconductors (ITRS 2003 Edition)

See also our dedicated UV Nanoimprint webpage.

Explore further: Camera system aids cancer clinical trial (w/ Video)

add to favorites email to friend print save as pdf

Related Stories

Environmentally compatible organic solar cells

18 hours ago

Environmentally compatible production methods for organic solar cells from novel materials are in the focus of "MatHero". The new project coordinated by Karlsruhe Institute of Technology (KIT) aims at making ...

Meteorite studies suggest hidden water on Mars

Apr 15, 2014

Geochemical calculations by researchers at Tokyo Institute of Technology to determine how the water content of Mars has changed over the past 4.5 billion years suggest as yet unidentified reservoirs of water ...

First direct observations of excitons in motion achieved

23 hours ago

A quasiparticle called an exciton—responsible for the transfer of energy within devices such as solar cells, LEDs, and semiconductor circuits—has been understood theoretically for decades. But exciton ...

The result of slow degradation

Apr 14, 2014

Why do environmental pollutants accumulate in the cold polar regions? This may not only be due to the fact that many substances are less volatile at low temperatures, as has been long suspected, but also ...

Ferns borrowed genes to flourish in low light

Apr 14, 2014

During the age of the dinosaurs, the arrival of flowering plants as competitors could have spelled doom for the ancient fern lineage. Instead, ferns diversified and flourished under the new canopy—using ...

Recommended for you

Innovative strategy to facilitate organ repair

7 hours ago

A significant breakthrough could revolutionize surgical practice and regenerative medicine. A team led by Ludwik Leibler from the Laboratoire Matière Molle et Chimie (CNRS/ESPCI Paris Tech) and Didier Letourneur ...

'Exotic' material is like a switch when super thin

8 hours ago

(Phys.org) —Ever-shrinking electronic devices could get down to atomic dimensions with the help of transition metal oxides, a class of materials that seems to have it all: superconductivity, magnetoresistance ...

Thinnest feasible nano-membrane produced

Apr 17, 2014

A new nano-membrane made out of the 'super material' graphene is extremely light and breathable. Not only can this open the door to a new generation of functional waterproof clothing, but also to ultra-rapid filtration. The ...

User comments : 0

More news stories

'Exotic' material is like a switch when super thin

(Phys.org) —Ever-shrinking electronic devices could get down to atomic dimensions with the help of transition metal oxides, a class of materials that seems to have it all: superconductivity, magnetoresistance ...

Innovative strategy to facilitate organ repair

A significant breakthrough could revolutionize surgical practice and regenerative medicine. A team led by Ludwik Leibler from the Laboratoire Matière Molle et Chimie (CNRS/ESPCI Paris Tech) and Didier Letourneur ...