ASML Introduces the Industry's Highest NA Immersion Tool for Volume Chip Production at 45 nm Node

Jul 13, 2005

ASML Holding NV (ASML) today announced a new lithography system with the highest numerical aperture (NA) – 1.2 – in the semiconductor industry. The ASML TWINSCAN XT:1700i system is a 193 nm immersion scanner capable of volume chip production at the 45 nm node. The new system has a NA that jumped from 0.93 to 1.2, skipping the perceived, pre-immersion barrier of 1.0. The first shipment to a customer, a leading semiconductor manufacturer ordering its second ASML immersion system, will take place in Q1 2006.

The XT:1700i allows chip makers to improve resolution by 30 percent, the largest improvement in decades. Better resolution means more chips per wafer or more functionality per chip, thus increasing the value of each wafer. Additionally, the XT:1700i has the highest throughput currently available, 122 wafers per hour, for the 45 nm node.

“The XT:1700i is a milestone for the semiconductor industry. The continuation of Moore’s Law depended on either adapting existing or introducing new technology. ASML was able to enhance its fourth-generation immersion systems with a NA that is unchallenged in the market,” said Martin van den Brink, executive vice president, marketing and technology, ASML.

Additional customer benefits found in the XT:1700i include:

-- A new catadioptric lens design which combines refractive components with mirrors to create a hyper NA lens that is cost effective to manufacture and a consistent size with other ASML systems. Co-designed with ASML’s optics partner, Carl Zeiss SMT AG, the new lens will also extend to larger NAs in future products;

-- A maximum field size of 26 by 33 mm, the largest in the industry;

-- A polarized illumination system for improved contrast and exposure latitude at full throughput. With an NA of 1.2, polarization enhances resolution by 5 nm, from 50 to 45 nm;

-- A fourth-generation, dual-stage immersion tool. All previous generation tools are being used by real customers to produce real chips.

Explore further: NSA winds down once-secret phone-records collection program

Related Stories

ICANN chief stepping down in early 2016

1 hour ago

The head of the group that oversees all Internet addresses will step down early next year, after a plan to end US oversight of the key nonprofit organization.

HP sells stake in China unit for $2.3 bn

2 hours ago

Hewlett-Packard announced Thursday it was selling a 51 percent stake in its China-based server business, creating a joint venture with Tsinghua Holdings that will be a sector leader in China.

Recommended for you

'Deep web search' may help scientists

39 minutes ago

When you do a simple Web search on a topic, the results that pop up aren't the whole story. The Internet contains a vast trove of information—sometimes called the "Deep Web"—that isn't indexed by search ...

Finger gestures will tell your smartwatch what to do

2 hours ago

Gesture control for smartwatches is the key mission for a startup called Deus Ex Technology. They have devised a module which can fit into a smartwatch band and behave as a gesture controller for your timepiece. ...

User comments : 0

Please sign in to add a comment. Registration is free, and takes less than a minute. Read more

Click here to reset your password.
Sign in to get notified via email when new comments are made.