Topology optimization of the MAM with different layer number and spacing distance. (A) Design model and schematic of the optimization region with indicated parameters described in the text. (B) Relations of the normalized intensity with the layer number and spacing distance. With the inverse design, the best case is located at [l, sp] = [3, 1.6 μm]. (C) Schematic of the edge rounding and surface smoothness approximations at different levels, initial design (i), level 1 by rounding the top (ii). Level 2 is generated by applying 10-nm relative tolerance interpolation to the origin height vector (iii), and level 3 is generated by applying 25-nm relative interpolation (iv). (D) Calculated FWHM (i), efficiency (ii), and position of maximum focal intensity along the propagation axis (iii) for different levels. The efficiency (ii) is calculated at the focal plane corresponding to the maximum focal intensity. (E) Tilted view SEM images of the fabricated MAM with 0.5 NA: (i) deconstructed MAM showing single, double, and triple (full) layers; (ii) enlarged view of full MAM; (iii) top view and size of the MAM; and (iv and v) sectioned MAM revealing internal structure and details of the 200-nm-wide ring structures. Credit: Science Advances, doi: 10.1126/sciadv.adj9262