Japanese researchers have succeeded in the batch fabrication of suspended structures (cantilevers and bridges) of single crystal diamond for nano/micro electromechanical systems.
Nanomaterials
Dec 24, 2010
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Panasonic and imec present at the International Electron Devices Meeting in San Francisco an innovative SiGe (silicon germanium) thin film packaged SOI-based MEMS resonator featuring an industry-record Q factor combined with ...
Electronics & Semiconductors
Dec 7, 2010
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A new technology enabling tiny machines called micro electromechanical systems to "self-calibrate" could make possible super-accurate and precise sensors for crime-scene forensics, environmental testing and medical diagnostics.
Electronics & Semiconductors
Aug 10, 2010
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Imec researchers demonstrated the value of its SiGe above-IC MEMS technology platform for improving performance of state-of-the-art MEMS with the development of new MEMS devices. The new devices are a 15µm SiGe micromirror ...
Electronics & Semiconductors
Jul 14, 2010
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(PhysOrg.com) -- Microelectromechanical devices -- tiny machines with moving parts -- are everywhere these days: they monitor air pressure in car tires, register the gestures of video game players, and reflect light onto ...
Engineering
Feb 26, 2010
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For the first time, a piezoelectric harvesting device fabricated by MEMS technology generates a record of 85μW electrical power from vibrations. A wafer level packaging method was developed for robustness. The packaged ...
Engineering
Dec 15, 2009
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HP today announced new inertial sensing technology that enables the development of digital micro-electro-mechanical systems (MEMS) accelerometers that are up to 1,000 times more sensitive than high-volume products currently ...
Engineering
Nov 5, 2009
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Mr Pradyumna Thiruvenkatanathan, a second year doctoral student in Engineering, is the recipient of the best student paper award in the sensors and transducers sub-field at the IEEE Frequency Control conference. The IEEE ...
Engineering
Sep 2, 2009
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(PhysOrg.com) -- Researchers are developing a new class of tiny mechanical devices containing vibrating, hair-thin structures that could be used to filter electronic signals in cell phones and for other more exotic applications.
Nanophysics
Aug 10, 2009
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(PhysOrg.com) -- Folding paper into shapes such as a crane or a butterfly is challenging enough for most people. Now imagine trying to fold something that's about a hundred times thinner than a human hair and then putting ...
Nanophysics
Feb 25, 2009
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