Advanced Research Center for Nanolithography

ARCNL is a public-private partnership between NWO (Dutch Research Council), University of Amsterdam, VU Amsterdam and the company ASML. ARCNL combines the best of both worlds: the scientific strength of NWO and its university partners with the application-oriented, demand-side management of the private party ASML. ARCNL focuses on the fundamental physics and chemistry behind current and future technology for nanolithography, especially for application in the semiconductor industry.

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