News tagged with optical lithography
Nanowire lens can reconfigure its imaging properties
(PhysOrg.com) -- By taking advantage of the unique optical properties of nanoscale materials, researchers have designed a lens made of nanowires that can reconfigure its imaging properties without any electronic ...
Oct 11, 2011 |
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Imec, ASML demonstrate potential of 193nm immersion lithography with freeform illumination
Imec and ASML collaborated to qualify ASML's Tachyon Source Mask Optimization and programmable illuminator system FlexRay, proving its potential with the demonstration of a 22nm SRAM memory cell.
Jul 14, 2010 |
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IBM demonstrates nonoscale 3D patterning technique (w/ Video)
(PhysOrg.com) -- IBM Research in Zurich has demonstrated a new nanoscale patterning technique that could replace electron beam lithography (EBL). The demonstration carved a 1:5 billion scale three-dimensional ...
Apr 23, 2010 |
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Toshiba, AIST Develop Mask Pattern Optimizing Technology That Extends Life of Optical Lithography
Toshiba and Japan's National Institute of Advanced Industrial Science and Technology (AIST) today announced joint development of a mask pattern optimizing technology that improves the accuracy of lithography ...
Feb 15, 2010 |
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Physicists develop 3D metamaterial nanolens that achieves super-resolution imaging
(PhysOrg.com) -- A research team from Northeastern University has developed a new nanolens that can beat the diffraction limit to achieve so-called super-resolution imaging, better than can be achieved by current technology. ...
Jan 18, 2010 |
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Micro Sparky: Engineering the tiniest Sun Devil
(PhysOrg.com) -- An Arizona State University engineering student may have found the tiniest - yet most cleverly inventive - way to show school spirit.
Oct 30, 2009 |
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New interferometer could simplify materials research
(PhysOrg.com) -- “Most current hard x-ray interferometers are based on crystals, which require their high quality and high mechanical stability,” Anatoly Snigirev tells PhysOrg.com. “This can make x-ray interferometry quite ...
Aug 13, 2009 |
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Scientists Shed 'Light' on Semiconductor Quandry
(PhysOrg.com) -- UC San Diego scientists are using laser plasma-produced light sources to explore performance improvements of critical inspection tools for the semiconductor industry, which ultimately will ...
Jul 14, 2009 |
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Fabricating 3D Photonic Crystals
(PhysOrg.com) -- “In photonic crystals, the ability to control the structure of a material in full three dimensional space, allows you to control the way that light flows through it,” John Rogers tells PhysOrg.com. “This ...
Jan 21, 2009 |
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