News tagged with immersion lithography

Imec, ASML demonstrate potential of 193nm immersion lithography with freeform illumination

Imec and ASML collaborated to qualify ASML's Tachyon Source Mask Optimization and programmable illuminator system FlexRay, proving its potential with the demonstration of a 22nm SRAM memory cell.

Technology / Semiconductors

created Jul 14, 2010 | popularity 5 / 5 (3) | comments 0

Toshiba, AIST Develop Mask Pattern Optimizing Technology That Extends Life of Optical Lithography

Toshiba and Japan's National Institute of Advanced Industrial Science and Technology (AIST) today announced joint development of a mask pattern optimizing technology that improves the accuracy of lithography ...

Technology / Semiconductors

created Feb 15, 2010 | popularity 5 / 5 (3) | comments 0




Search results for immersion lithography


Imec releases industry’s first 14nm process development kit

Imec today announces that it has released an early-version PDK (process development kit) for 14nm logic chips. This PDK is the industry’s first to address the 14nm technology node. It targets the introduction of a number ...

Technology / Semiconductors

created Mar 07, 2012 | popularity 3 / 5 (5) | comments 1

New technique produces free-standing piezoelectric ferroelectric nanostructures from PZT material

(PhysOrg.com) -- Researchers have developed a “soft template infiltration” technique for fabricating free-standing piezoelectrically active ferroelectric nanotubes and other nanostructures from PZT ...

Nanotechnology / Nanophysics

created Feb 22, 2012 | popularity 5 / 5 (7) | comments 4 | with audio podcast

World's first 300mm-fab compatible directed self-assembly process line

At next week’s SPIE Advanced Lithography conference (San Jose, CA), imec announces the successful implementation of the world first 300mm fab-compatible Directed Self-Assembly (DSA) process line all-under-one-roof ...

Technology / Semiconductors

created Feb 10, 2012 | popularity 4 / 5 (1) | comments 0

New technique makes it easier to etch semiconductors

Creating semiconductor structures for high-end optoelectronic devices just got easier, thanks to University of Illinois researchers.

Nanotechnology / Nanophysics

created Dec 22, 2011 | popularity 3.6 / 5 (5) | comments 3 | with audio podcast

Apparent roadblock in the development of quantum lithography

(PhysOrg.com) -- Just when it began to appear that scientists had found a viable way around the problem of the blurring that occurs when using masks to create smaller and smaller silicon wafers for computer ...

Physics / Quantum Physics

created May 20, 2011 | popularity 4.2 / 5 (5) | comments 5 | with audio podcast report

Engineer shrinks 'U' logo

In an example of how a technology wonk displays school spirit, an engineer has created a golden University of Utah logo that is smaller than the width of an average human hair.

Nanotechnology / Nanomaterials

created Sep 17, 2010 | popularity not rated yet | comments 0

Toshiba develops cost-effective 32nm CMOS platform technology by advanced single exposure lithography

Toshiba Corporation today announced a cost-effective 32nm CMOS platform technology that offers higher density and improved performance while halving the cost per function from 45nm technology.

Technology / Semiconductors

created Dec 18, 2008 | popularity 5 / 5 (1) | comments 0

Intel to produce 32nm chips

Intel Corp., the world's biggest computer chip-maker, said Wednesday that it has developed a manufacturing process that shrinks the circuitry in a chip to just 32 nanometers.

Technology / Semiconductors

created Dec 10, 2008 | popularity 4.1 / 5 (31) | comments 9

Elpida Completes Development of New 50nm Process 2-Gigabit Mobile RAM

Elpida Memory today announced that it had completed development of a 50nm process 2-gigabit Mobile RAM product using 50nm process technology with 193nm (ArF) immersion lithography and copper interconnect.

Technology / Semiconductors

created Dec 10, 2008 | popularity 4 / 5 (1) | comments 0

Elpida Completes Development of 50nm Process DDR3 SDRAM

Elpida Memory, Japan's leading global supplier of Dynamic Random Access Memory (DRAM), today announced that it has completed development of a 50nm process DDR3 SDRAM. The new DRAM product features the lowest power consumption ...

Technology / Semiconductors

created Nov 26, 2008 | popularity 3 / 5 (2) | comments 0


List of search results for immersion lithography