UMC Develops Ultimate Spacer Process to Enhance MOSFET Device Performance for 65nm and Beyond

Dec 07, 2005

UMC today announced that its Central Research and Development Division (CRD) has successfully developed an Ultimate Spacer Process (USP) technology that simultaneously enhances NMOS and PMOS device performance. Devices fabricated at UMC using USP exhibited drive current improvements of 15% for NMOS and 7% for PMOS, while maintaining overall process simplicity. This accomplishment is instrumental in achieving performance improvement during increasingly difficult CMOS scaling situations.

"Seeking ways to enhance electron and hole mobility is a major focus for device development at UMC," said Dr. Mike Ma, deputy division director of Exploratory Technology for the Central Research and Development division at UMC. "The USP technology enables UMC to provide an extra performance improvement option to complement our other mobility enhancement technologies. With only one additional process step inserted, USP also delivers a manufacturability advantage over other strained silicon technologies."

In addition, the performance advantage of USP can be leveraged with other mobility enhancement techniques; combining USP with substrate orientation engineering resulted in a 35% PMOS drive current enhancement. This USP technology has also been successfully deployed in a customer FPGA product, resulting in a 15% speed improvement without compromising yield and reliability performance. This confirms the readiness of applying USP technology for 65nm mass production and beyond.

UMC will present a detailed report of this technology at the "2005 IEEE International Electron Devices Meeting" in Washington, D.C. on December 7.

Explore further: An android opera: Japan's Shibuya plots new era of robot music

add to favorites email to friend print save as pdf

Related Stories

Hitachi Ups the Ante for Unified Enterprise Storage

May 15, 2007

The new Platform V mega-system offers virtually unlimited scalability plus both virtualization and thin provisioning to provide what the company claims is "the most advanced storage system on the planet."

Physicists Set New Record for Network Data Transfer

Dec 13, 2006

An international team of physicists, computer scientists, and network engineers led by the California Institute of Technology, CERN, and the University of Michigan and partners at the University of Florida and Vanderbilt, ...

Recommended for you

Skin icons can tap into promise of smartwatch

1 hour ago

You have heard it before: smartwatches are cool wearables but critics remind us of the fact that their small size makes many actions cumbersome and they question how many people will really have them on their ...

Samsung phones cleared for US government use

2 hours ago

Samsung Electronics Co. said Tuesday some of its Galaxy mobile devices were approved by the National Security Agency for use with classified U.S. government networks and data, a boost to the company's efforts to expand in ...

Amazon, Simon & Schuster sign book retail deal

3 hours ago

Amazon has reached a deal with American book publisher Simon & Schuster, the companies said, though the e-commerce giant remains at loggerheads with France's Hachette over e-book pricing.

User comments : 0