Riding an electron wave into the future of microchip fabrication

November 13, 2013
Riding an electron wave into the future of microchip fabrication
A plasma wave can give rise to a population of suprathermal electrons. Credit: I.D. Kaganovich and D. Sydorenko

Advanced plasma-based etching is a key enabler of Moore's Law that observes that the number of transistors on integrated circuits doubles nearly every two years. It is the plasma's ability to reproduce fine patterns on silicon that makes this scaling possible and has made plasma sources ubiquitous in microchip manufacturing.

A groundbreaking fabrication technique, based on what is called a DC-augmented capacitively coupled plasma source, affords chip makers unprecedented control of the plasma. This process enables DC-electrode borne electron beams to reach and harden the surface of the mask that is used for printing the microchip circuits. More importantly, the presence of the beam creates a population of suprathermal electrons in the plasma, producing the plasma chemistry that is necessary to protect the mask. The energy of these electrons is greater than simple thermal heating could produce—hence the name "suprathermal." But how the beam electrons transform themselves into this suprathermal population has been a puzzle.

Now a computer simulation developed at the U.S. Department of Energy's Princeton

Plasma Physics Laboratory in collaboration with the University of Alberta has shed light on this transformation. The simulation reveals that the initial DC-electrode borne beam generates intense plasma waves that move through the plasma like ripples in water. And it is this beam-plasma instability that leads to the generation of the crucial suprathermal electrons.

Understanding the role these instabilities play provides a first step toward still-greater control of the plasma-surface interactions, and toward further increasing the number of on . Insights from both numerical simulations and experiments related to beam-plasma instabilities thus portend the development of new sources and the increasingly advanced chips that they fabricate.

Explore further: New imaging technique provides improved insight into controlling the plasma in fusion experiments

More information: Abstract:
TO6.00005 Collisionless acceleration of plasma electrons by intense electron beam
Session: Low Temperature Plasma Science, Engineering and Technology
9:30 AM–11:06 AM, Thursday, November 14, 2013

Related Stories

Hydrogen beam injector guides plasma physics research

September 27, 2012

(Phys.org)—The Madison Symmetric Torus, a leading piece of equipment in plasma physics research for more than 20 years, recently gained a new capability with the installation of a neutral beam injector.

Bring a 50,000-degree plasma into your living room

November 13, 2013

With the rise of online open course platforms such as Khan Academy, MIT OpenCourseWare and iTunes U, it has never been easier to teach yourself everything from American history to semiconductor manufacturing. These courses ...

Putting a new spin on tokamak disruptions

November 13, 2013

In the quest for fusion energy on earth, researchers use magnetic fields to insulate hot plasma from the walls of the chamber to maintain the reaction and prevent damage to interior surfaces. In the tokamak, a leading contender ...

Plasma etching pushes the limits of a shrinking world

November 10, 2011

Plasma etching (using an ionized gas to carve tiny components on silicon wafers) has long enabled the perpetuation of Moore's Law -- the observation that the number of transistors that can be squeezed into an integrated circuit ...

Recommended for you

Uncovering the secrets of water and ice as materials

December 7, 2016

Water is vital to life on Earth and its importance simply can't be overstated—it's also deeply rooted within our conscience that there's something extremely special about it. Yet, from a scientific point of view, much remains ...

Blocks of ice demonstrate levitated and directed motion

December 7, 2016

Resembling the Leidenfrost effect seen in rapidly boiling water droplets, a disk of ice becomes highly mobile due to a levitating layer of water between it and the smooth surface on which it rests and melts. The otherwise ...

The case for co-decaying dark matter

December 5, 2016

(Phys.org)—There isn't as much dark matter around today as there used to be. According to one of the most popular models of dark matter, the universe contained much more dark matter early on when the temperature was hotter. ...

0 comments

Please sign in to add a comment. Registration is free, and takes less than a minute. Read more

Click here to reset your password.
Sign in to get notified via email when new comments are made.