PVA Tepla, imec demonstrate 3D through-silicon via (TSV) void detection using GHz scanning acoustic microscopy

Jan 17, 2013

Imec and PVA Tepla present breakthrough results in the detection of TSV voids in 3D stacked IC technology. After having applied Scanning Acoustic Microscopy to temporary wafer (de)bonding inspection, they successfully used new advanced GHz SAM technology to detect TSV voids at wafer-level after TSV Copper plating. Together, they will continue to investigate the applicability of high-frequency scanning acoustic microscopy for non-destructive submicron void detection.

The initial focus of the collaboration was on developing aimed at detecting voids after temporary , allowing for proper rework of 3D wafers. Temporary wafer (de)bonding and thin wafer handling remains challenging for 3D stacked IC technology. The development of interface and voids during the temporary bonding process has a detrimental impact on the subsequent wafer thinning process steps, affecting the wafer thinning performance as well as long-term tool stability and performance. PVA Tepla and imec have developed an automated foup-to-foup, wafer-level process based on 200MHz Scanning Acoustic Microscopy (SAM) using Tepla's AutoWafer 300 tool.

After demonstrating non-destructive detection of interface particles and voids, imec used PVA Tepla's high-resolution capability GHz frequency SAM tool to successfully detect voids in TSVs of 5µm diameter and 50µm depth, immediately after plating. Future work will concentrate on further refining the process and implementing GHz SAM capability to increase the spatial detection resolution. Moreover, and PVA Tepla will investigate the applicability of GHz SAM to detect submicron voids in TSV and to investigate other aspects related to 3D-technology such as bump connection quality.

Explore further: X-ray detector on plastic delivers medical imaging performance

add to favorites email to friend print save as pdf

Related Stories

Imec and Atrenta develop exploration flows for 3D ICs

May 24, 2011

Atrenta Inc., a leading provider of SoC Realization solutions for the semiconductor and electronic systems industries, in collaboration with imec’s 3D integration IIAP (industrial affiliation program), have jointly developed ...

Recommended for you

Ex-Apple chief plans mobile phone for India

5 hours ago

Former Apple chief executive John Sculley, whose marketing skills helped bring the personal computer to desktops worldwide, says he plans to launch a mobile phone in India to exploit its still largely untapped ...

Health care site flagged in Heartbleed review

18 hours ago

People with accounts on the enrollment website for President Barack Obama's signature health care law are being told to change their passwords following an administration-wide review of the government's vulnerability to the ...

Airbnb rental site raises $450 mn

19 hours ago

Online lodging listings website Airbnb inked a $450 million funding deal with investors led by TPG, a source close to the matter said Friday.

Four questions about missing Malaysian plane answered

19 hours ago

Travelers at Asian airports have asked questions about the March 8 disappearance of Malaysia Airlines Flight 370 while en route from Kuala Lumpur to Beijing. Here are some of them, followed by answers.

Android gains in US, basic phones almost extinct

Apr 18, 2014

The Google Android platform grabbed the majority of mobile phones in the US market in early 2014, as consumers all but abandoned non-smartphone handsets, a survey showed Friday.

User comments : 1

Adjust slider to filter visible comments by rank

Display comments: newest first

NDTester
not rated yet Feb 04, 2013
SAM is no stranger to wafer inspection at 200 MHz to find 5µm voids. Sonoscan, Sonix, OKOS, and a number of other high frequency acoustic micro imaging manufacturers are capable of the same results. Interesting how IMEC has found a new location for SAM in the process line though.

More news stories

Ex-Apple chief plans mobile phone for India

Former Apple chief executive John Sculley, whose marketing skills helped bring the personal computer to desktops worldwide, says he plans to launch a mobile phone in India to exploit its still largely untapped ...

Airbnb rental site raises $450 mn

Online lodging listings website Airbnb inked a $450 million funding deal with investors led by TPG, a source close to the matter said Friday.

Health care site flagged in Heartbleed review

People with accounts on the enrollment website for President Barack Obama's signature health care law are being told to change their passwords following an administration-wide review of the government's vulnerability to the ...

A homemade solar lamp for developing countries

(Phys.org) —The solar lamp developed by the start-up LEDsafari is a more effective, safer, and less expensive form of illumination than the traditional oil lamp currently used by more than one billion people ...

NASA's space station Robonaut finally getting legs

Robonaut, the first out-of-this-world humanoid, is finally getting its space legs. For three years, Robonaut has had to manage from the waist up. This new pair of legs means the experimental robot—now stuck ...

Filipino tests negative for Middle East virus

A Filipino nurse who tested positive for the Middle East virus has been found free of infection in a subsequent examination after he returned home, Philippine health officials said Saturday.

Egypt archaeologists find ancient writer's tomb

Egypt's minister of antiquities says a team of Spanish archaeologists has discovered two tombs in the southern part of the country, one of them belonging to a writer and containing a trove of artifacts including reed pens ...