Reference Materials Planned for Semiconductor Industry

July 1, 2005

Companies and research organizations are invited to collaborate with the National Institute of Standards and Technology (NIST) and SEMATECH in the development and evaluation of a new generation of reference materials for the semiconductor and tool manufacturing industries. The work is a continuation of NIST's efforts to provide standard "rulers" for measuring chip features. The new reference materials will differ from the previous generation in several ways. Current plans call for each reference material to be configured as a 200-millimeter wafer with a selection of die sites, each with multiple test structures with certified critical dimensions between 40 and 500 nanometers.

The reference-material design, fabrication and calibration will be led by the NIST-SEMATECH team. The principal role of participating companies and other organizations will be evaluation of the reference materials, but they also may contribute expertise, equipment time, or other resources. Participants will receive one or more wafers, and all associated measurement documentation, on completion of the work.

Those interested in participating are invited to a public event scheduled for July 13, 2005, at the San Francisco Marriott. More information and registration forms are available online at www.sematech.org/membersite/MServlet?mtgId=7682. For further information contact, Michael Cresswell, michael.cresswell@nist.gov, (301) 975-2072.

Information about the previous set of reference materials, delivered to SEMATECH member companies earlier this year, is available at www.physorg.com/news3177.html

Source: NIST

Explore further: Private lives are exposed as WikiLeaks spills its secrets

Related Stories

Private lives are exposed as WikiLeaks spills its secrets

August 23, 2016

WikiLeaks' global crusade to expose government secrets is causing collateral damage to the privacy of hundreds of innocent people, including survivors of sexual abuse, sick children and the mentally ill, The Associated Press ...

'Artificial atom' created in graphene

August 22, 2016

In a tiny quantum prison, electrons behave quite differently as compared to their counterparts in free space. They can only occupy discrete energy levels, much like the electrons in an atom - for this reason, such electron ...

When disaster-response apps fail

August 11, 2016

When a terrorist struck Nice, France, on July 14, a new French government app designed to alert people failed. Three hours passed before SAIP, as the app is called, warned people in and around Nice to the danger on the city's ...

Recommended for you

Rosetta captures comet outburst

August 25, 2016

In unprecedented observations made earlier this year, Rosetta unexpectedly captured a dramatic comet outburst that may have been triggered by a landslide.

0 comments

Please sign in to add a comment. Registration is free, and takes less than a minute. Read more

Click here to reset your password.
Sign in to get notified via email when new comments are made.