Sony successful with AIXTRON Planetary Reactor

August 9, 2004

AIXTRON is delighted to announce the purchase and successful start-up of an AIX 2600G3 system by Sony. The system is capable to grow on multiple wafer configurations ranging from 3" to 6" diameter and is equipped for processing various compound semiconductor devices. The system includes an EpiRAS 2000TT sensor for in-situ measurement of doping, composition, thickness and true temperature during the epitaxial growth. Sony has decided to purchase the AIX 2600G3 reactor after evaluating carefully the capabilities of systems offered by various MOVPE suppliers.

A Project Leader of Sony states: "We have proved that the AIX 2600G3 system is a highly versatile tool equally well suited for R&D purposes as for high-volume production with respect to the large process window, high reproducibility and uniformity of epitaxial growth. Furthermore, the EpiRAS allows us to control the epitaxial process, which is essential for the development of next generation's devices and their subsequent transfer to mass-production. Last but not least, we were impressed by the co-operation regarding customer service and support provided by AIXTRON's Japanese subsidiary and the headquarter in Aachen."

Dr. Frank Schulte, former Director of AIXTRON K.K. and new Manager Product Marketing adds: "We are pleased that a highly renowned company like Sony opts for the AIXTRON Planetary Reactor and we are sure that our system will even exceed their expectations. The capability to grow various kinds of highest quality materials as well as its excellent reproducibility together with a low cost of ownership makes AIXTRON's Planetary Reactor the perfect choice for our customer. We are looking forward to a further successful co-operation with Sony."

AIXTRON is, as verified by an independent market research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse) and is included in the MSCI World Index.

Source: AIXTRON

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