Nano Layer Deposition; Unique Thin Film Deposition Technology Surpasses Atomic Layer Deposition in Flexibility

Jul 22, 2004

Tegal Corporation today announced that it has been granted United States Patents, No. 6,689,220 and 6,756,318, which enable nano layer deposition (NLD) of conformal thin films for barrier, copper seed and high-K dielectric applications in advanced microprocessor and memory device production.

The systems and methods described in the '220 and the '318 enable nano layer deposition with ultra-conformality comparable to that of atomic layer deposition (ALD) and the manufacturing throughput of more conventional chemical vapor deposition (CVD) systems. NLD allows semiconductor manufacturers to choose from a wide field of deposition precursors (a key limitation of ALD) for the application of any thin film in use today on the surface of a wafer with atomic layer precision. NLD technology can also be used to construct complex, compound film structures with a level of control and conformality that was previously unavailable or impractical.

The '220 patent covers a system and process incorporating a pulsed plasma and deposition technique applicable to a variety of films such as Titanium Nitride, Copper and several low-K (dielectric constant) insulating films. The pulsing technique can also be used to deposit a low-K material and to "seal" it in-situ in order to preserve the film's low-K properties. This has been a major limitation to the successful implementation of low-K dielectric materials into current generations of semiconductors.

The '318 patent combines system design, source design and NLD technology to enable a manufacturing solution for next generation semiconductor devices. The '318 discloses a new helical ribbon electrode as a plasma source for use in an NLD system. The '318 patent builds on the technology disclosed in the '220 patent and provides a multi-chamber platform for performing a wide variety of processing steps such as pre-clean, etch, NLD, densification, etc. As a result, complex films can be deposited with complete conformality and layer thicknesses can be controlled to one monolayer or to several hundred of Angstroms.

The market for highly conformal deposition tools, such as ALD and NLD, is one of the fastest-growing segments of the semiconductor device manufacturing space. According to VLSI Research Inc., the current market for highly conformal deposition tools is over US$100 million and will grow at an annual rate of over 66% to reach US$1.35 billion in 2008.

"We are pleased to add these two key patents to Tegal's extensive base of intellectual property and know-how," said Michael Parodi, Tegal chairman, president & CEO. "This is one of the most exciting areas that Tegal has ever participated in, and we look forward to demonstrating the superiority of our NLD systems in the market."

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the company's products and services. All forward-looking statements attributable to the company or persons acting on its behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the company's periodic filings with the Securities and Exchange Commission.

Source: Tegal Corporation

Explore further: Project uses crowd computing to improve water filtration

Related Stories

Solar Impulse 2 pilot becomes aviation legend

10 hours ago

At 62 years of age, Swiss Solar Impulse 2 pilot Andre Borschberg has made aviation history with a record breaking solo flight across the Pacific that he has called "an interior journey".

Facegloria: Facebook for Brazil's Evangelicals

10 hours ago

Fluffy clouds waft across a blue sky as you log in and while you chat with friends, Gospel music rings out: welcome to Facegloria, the social network for Brazilian Evangelicals.

Mexico City proposes regulations for Uber

10 hours ago

Mexico City is proposing regulations that would allow Uber and other smartphone-based ride-sharing apps to operate, while requiring drivers and cars to be registered, the city's Office of Legal and Legislative Studies said ...

Message-bearing coffee foam taps printer mechanics

Jun 28, 2015

If vendors could choose the key marketing rule of thumb for the past decade, you might learn they did it with two words, Personalize This. From sneakers to t-shirts to news feeds to music services, market ...

Recommended for you

Project uses crowd computing to improve water filtration

6 hours ago

Nearly 800 million people worldwide don't have access to safe drinking water, and some 2.5 billion people live in precariously unsanitary conditions, according to the Centers for Disease Control and Prevention. ...

Engineering the world's smallest nanocrystal

10 hours ago

In the natural world, proteins use the process of biomineralization to incorporate metallic elements into tissues, using it to create diverse materials such as seashells, teeth, and bones. However, the way ...

A stretchy mesh heater for sore muscles

Jul 03, 2015

If you suffer from chronic muscle pain a doctor will likely recommend for you to apply heat to the injury. But how do you effectively wrap that heat around a joint? Korean Scientists at the Center for Nanoparticle ...

Polymer mold makes perfect silicon nanostructures

Jul 03, 2015

Using molds to shape things is as old as humanity. In the Bronze Age, the copper-tin alloy was melted and cast into weapons in ceramic molds. Today, injection and extrusion molding shape hot liquids into ...

User comments : 0

Please sign in to add a comment. Registration is free, and takes less than a minute. Read more

Click here to reset your password.
Sign in to get notified via email when new comments are made.